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首页> 外文期刊>Nuclear Instruments & Methods in Physics Research. Section A, Accelerators, Spectrometers, Detectors and Associated Equipment >Inter-electrode charge collection in high-purity germanium detectors with amorphous semiconductor contacts
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Inter-electrode charge collection in high-purity germanium detectors with amorphous semiconductor contacts

机译:具有非晶半导体触点的高纯度锗探测器中的电极间电荷收集

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摘要

High-purity germanium (HPGe) radiation detectors with segmented signal readout electrodes combine excellent energy resolution with fine spatial resolution, opening exciting possibilities in radiation imaging applications. Segmenting the electrodes provides the ability to determine the positions of radiation interactions in the detector, but it also brings potential challenges that can inhibit performance. A challenge unique to segmented electrode detectors is collection of charge carriers to the gap between adjacent electrodes rather than to the electrodes themselves, which gives a deficit in the summed energy. While amorphous semiconductor electrical contacts have enabled a simplified fabrication process capable of fine electrode segmentation, the amorphous semiconductor passivation layer between electrodes is prone to inter-electrode charge collection. This article presents a study of the impact of fabrication process parameters on the energy deficit due to inter-electrode charge collection for double-sided strip detectors. Eight double-sided strip HPGe detectors were fabricated with amorphous germanium (a-Ge) and amorphous silicon (a-Si) contacts formed by sputter deposition. Each detector was evaluated for inter-electrode charge collection performance, using as a metric the deficit in the summed signal of two adjacent electrodes. It is demonstrated that both a-Ge and a-Si contacts can be produced with nearly non-existent inter-electrode charge collection when the appropriate combination of sputter gas hydrogen content and gas pressure are selected.
机译:具有分段信号读出电极的高纯锗(HPGe)辐射探测器结合了出色的能量分辨率和精细的空间分辨率,为辐射成像应用开辟了令人兴奋的可能性。分割电极可以确定探测器中辐射相互作用的位置,但同时也带来了潜在的挑战,可能会抑制性能。分段电极检测器独有的挑战是将电荷载流子收集到相邻电极之间的间隙中,而不是收集到电极本身上,这使总能量不足。尽管非晶半导体电接触已实现了能够精细分割电极的简化制造工艺,但电极之间的非晶半导体钝化层却易于电极间电荷收集。本文介绍了由于双面带状检测器的电极间电荷收集而导致的制造工艺参数对能量不足的影响的研究。八个双面条状HPGe检测器由非晶锗(a-Ge)和通过溅射沉积形成的非晶硅(a-Si)触点制成。使用两个相邻电极的求和信号的不足作为度量,评估每个检测器的电极间电荷收集性能。已经证明,当选择溅射气体氢含量和气压的适当组合时,a-Ge和a-Si接触都可以产生几乎不存在的电极间电荷收集。

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