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Embedded pitch adapters: A high-yield interconnection solution for strip sensors

机译:嵌入式螺距适配器:用于带状传感器的高产量互连解决方案

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摘要

A proposal to fabricate large area strip sensors with integrated, or embedded, pitch adapters is presented for the End-cap part of the Inner Tracker in the ATLAS experiment. To implement the embedded pitch adapters, a second metal layer is used in the sensor fabrication, for signal routing to the ASICs. Sensors with different embedded pitch adapters have been fabricated in order to optimize the design and technology. Inter-strip capacitance, noise, pick-up, cross-talk, signal efficiency, and fabrication yield have been taken into account in their design and fabrication. Inter-strip capacitance tests taking into account all channel neighbors reveal the important differences between the various designs considered. These tests have been correlated with noise figures obtained in full assembled modules, showing that the tests performed on the bare sensors are a valid tool to estimate the final noise in the full module. The full modules have been subjected to test beam experiments in order to evaluate the incidence of cross-talk, pick-up, and signal loss. The detailed analysis shows no indication of cross-talk or pick-up as no additional hits can be observed in any channel not being hit by the beam above 170 mV threshold, and the signal in those channels is always below 1% of the signal recorded in the channel being hit, above 100 mV threshold. First results on irradiated mini-sensors with embedded pitch adapters do not show any change in the interstrip capacitance measurements with only the first neighbors connected.
机译:在ATLAS实验中,针对内部跟踪器的端盖部分提出了一种制造带有集成或嵌入式螺距适配器的大面积带状传感器的建议。为了实现嵌入式螺距适配器,在传感器制造中使用了第二金属层,用于将信号路由到ASIC。为了优化设计和技术,已制造出具有不同嵌入式螺距适配器的传感器。条带间电容,噪声,拾取,串扰,信号效率和制造成品率已在其设计和制造过程中加以考虑。带间电容测试考虑了所有通道邻居,揭示了所考虑的各种设计之间的重要差异。这些测试已经与在完整组装的模块中获得的噪声系数相关联,表明在裸传感器上执行的测试是估算整个模块中最终噪声的有效工具。整个模块都经过了测试光束实验,以评估串扰,拾取和信号损耗的发生率。详细的分析表明没有串扰或拾取的迹象,因为在未被170 mV阈值以上的光束击中的任何通道中都没有观察到额外的击中,并且这些通道中的信号始终低于所记录信号的1%在被击中的通道中,高于100 mV阈值。带有嵌入式螺距适配器的辐射式微型传感器的初步结果并未显示仅连接了第一个邻居时的条间电容测量的任何变化。

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