Interchangeable DUT-board Fixture Technique among Failure Analysis Tools

摘要

A new LSI-tester-interface fixture has been developed to make DUT boards interchangeable among failure analysis tools. It can be attachable to both electron-beam testers and light-emission micro- scopes, can accommodate not only DUT boards for packaged chips, but also probe cards for wafers with up to 512 pins, and has a flexible structure so the fixture dose not tightly occupy the LSI tester.