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Characterization of micro-crack propagation through analysis of edge effect in acoustic microimaging of microelectronic packages

机译:通过分析微电子封装的声学微成像中的边缘效应来表征微裂纹的传播

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摘要

The miniaturization and three dimensional die stacking in advanced microelectronic packages poses a big challenge to their non-destructive evaluation by acoustic microimaging. In particular, their complicated structures and multiple interfaces make the interpretation of acoustic data even more difficult. A common phenomenon observed in acoustic microimaging of microelectronic packages is the edge effect phenomena, which obscures the detection of defects such as cracks and voids. In this paper, two dimensional finite element modelling is firstly carried out to numerically simulate acoustic microimaging of modern microelectronic packages. A flip-chip with a 140 μm solder bump and a 230 MHz virtual transducer with a spot size of 16 μm are modelled. Crack propagation in the solder bump is further modelled, and B-scan images for different sizes of micro-cracks are obtained. C-line plots are then derived from the simulated B-scan images to quantitatively analyze the edge effect. Gradual progression of the crack is found to have a predictable influence on the edge effect profile. By exploiting this feature, a crack propagation characterization method is developed. Finally, an experiment based on the accelerated thermal cycling test is designed to verify the proposed method.
机译:先进的微电子封装的小型化和三维管芯堆叠对通过声学微成像技术进行无损评估提出了巨大挑战。特别是,它们复杂的结构和多个接口使声音数据的解释更加困难。在微电子封装的声学微成像中观察到的常见现象是边缘效应现象,这种现象会掩盖对裂纹和空隙等缺陷的检测。本文首先进行了二维有限元建模,以数值模拟现代微电子封装的声学微成像。对具有140μm焊料凸点的倒装芯片和点尺寸为16μm的230 MHz虚拟传感器进行了建模。进一步模拟了焊料凸块中的裂纹扩展,并获得了不同尺寸的微裂纹的B扫描图像。然后从模拟的B扫描图像中得出C线图,以定量分析边缘效应。发现裂纹的逐渐发展对边缘效应轮廓具有可预测的影响。通过利用该特征,开发了裂纹扩展表征方法。最后,设计了基于加速热循环试验的实验来验证该方法。

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