Four-Point-Latching Microactuator

摘要

Figure 1 depicts an experimental inch-worm-type linear microactuator. This microactuator is a successor to the one described in "MEMS-Based Piezoelectric/ Electrostatic Inchworm Actuator" (NPO-30672), NASA Tech Briefs, Vol. 27, No. 6 (June 2003), page 68. Both actuators are based on the principle of using a piezoelectric transducer (PZT) operated in alternation with electrostatically actuated clutches to cause a slider to move in small increments.