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Effect of Rotating Magnetic Field on Thermal Convection and Dopant Transport in Floating-Zone Crystal Growth

机译:旋转磁场对浮区晶体生长热对流和掺杂输送的影响

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摘要

A three-dimensional numerical study was carried out to understand the effects of rotating magnetic field on thermocapillary convection and impurity concentration distribution in a floating full zone growth process of doped Si crystals under zero gravity. Even though the applied temperature profile was axisymmetric, the simulation results showed that the flow structures and concentration distribution in the molten zone exhibited three-dimensional disordered patterns in the absence of a rotating magnetic field. For the application of rotating magnetic field, Lorentz force forced convection to rotate in the same direction of the magnetic field and made the tangential velocity in the melt increase with the growing radial distance. Under a relatively low magnetic field, the thermocapillary flow became an oscillatory three-dimensional convection. However, two dimensional axisymmetric distributions of both the melt flow and the impurity concentration were presented under the magnetic field with sufficiently strong intensity. Meanwhile, the thermocapillary convection in the molten zone formed a back flow region with flow in the direction from the high temperature to low temperature along the free surface and through intermediate section. The concentration contours became uniform, and thus the isolines of concentration formed a series of concentric circles in the growth interface. Therefore, the rotating magnetic field was effective for ameliorating the stability of the melt flow and the uniformity of the concentration distribution which was beneficial to the growth of crystals with a radial uniform crystal.
机译:进行了三维数值研究,以了解旋转磁场对零重力下掺杂Si晶体浮动全区生长过程中热量的磁场和杂质浓度分布的影响。即使施加的温度曲线是轴对称,仿真结果表明,熔融区中的流动结构和浓度分布在不存在旋转磁场的情况下表现出三维无序图案。为了旋转磁场的应用,洛伦兹力强制对流在磁场的相同方向上旋转,并随着径向距离的增长而使熔体的切向速度增加。在相对低的磁场下,热量流量变为振荡三维对流。然而,熔体流动和杂质浓度的二维轴对称分布在磁场下以足够强烈的强度呈现。同时,熔融区中的热量量对流形成了沿着自由表面和中间部分的高温向低温流向的后流动区域。浓度轮廓变得均匀,因此浓度的分离型在生长界面中形成了一系列同心圆。因此,旋转磁场是有效改善熔体流动的稳定性和浓度分布的均匀性,这对具有径向均匀晶体的晶体生长有益的浓度分布。

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