Annealing effect on the metal gate effective work function modulation for the Al/TiN/SiO_2/p-Si structure

摘要

In this work, the thermal annealing effect on the metal gate effective work function (EWF) modulation for the Al/TiN/SiO_2/p-Si(l 0 0) structure was investigated. Compared with the sample of TiN/SiO_2/p-Si( 1 0 0) structure, for the sample additionally capped with AI the flat band voltage has a very obvious shift as large as 0.54 V to the negative direction after forming gas annealing. It is also revealed that the thermal budget can effectively influence both the EWF of the gate electrode and the thickness of the gate dielectric layer when a post annealing at 600 ℃ with different soak times was applied to the samples with Al cap. Material characterization indicates that the diffusion of Al and the formation of Al oxide during annealing should be responsible for all the phenomena. The interface trap density Dit calculated from the high-frequency C-V and the laser-assisted high-frequency C-V curves show that the introduction of Al does not cause reliability problem in the AI/TiN/SiO_2/p-Si structure.