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The characteristics of Cu nanopaste sintered by atmospheric-pressure plasma

机译:常压等离子体烧结Cu纳米膏的特性

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摘要

There are two main technologies for the commercialization of printable and flexible electronic devices. One is the manufacture of nanomaterials such as nanoinks and nanopastes that include conducting nanopartides, and another is heat treatment at lower temperatures. Copper (Cu) nanopaste and atmospheric-pressure plasma (APP) sintering is highly adoptable for mass production of printable and flexible electronic devices at low cost. The relation between the microstructure of screen-printed Cu nanopaste and its electrical properties was investigated. The characteristics of Cu patterns sintered by APP were compared to those sintered by conventional radiation-conduction-convection heating. The Cu patterns sintered at 250 W for 40 min showed the lowest electrical resistivity of 21.06 μΩ cm, which is around 12.61 times of the bulk Cu. All of the Cu pattern surfaces sintered by APP showed lower oxygen concentrations than those sintered by conventional heating.
机译:可打印和柔性电子设备的商业化主要有两种技术。一种是制造包括导电纳米粒子的纳米材料,例如纳米墨水和纳米浆料,另一种是在较低温度下进行热处理。铜(Cu)纳米膏和大气压等离子体(APP)烧结非常适合以低成本大规模生产可打印和柔性电子设备。研究了丝网印刷铜纳米膏的微观结构与其电性能之间的关系。比较了用APP烧结的Cu图案和通过常规辐射传导对流加热烧结的Cu图案的特性。在250 W下烧结40分钟的Cu图案显示出最低的电阻率21.06μΩcm,约为整体Cu的12.61倍。通过APP烧结的所有Cu图案表面均显示出比通过常规加热烧结的更低的氧浓度。

著录项

  • 来源
    《Microelectronic Engineering 》 |2013年第7期| 121-124| 共4页
  • 作者单位

    SKKU Advanced Institute of Nanotechnology (SAINT), Sungkyunkwan University, 300 Cheoncheon-dong, Jangan-gu, Suwon 440-746, Republic of Korea;

    School of Advanced Materials Science and Engineering, Sungkyunkwan University, 300 Cheoncheon-dong, Jangan-gu, Suwon 440-746, Republic of Korea;

    Department of Fine Chemical Engineering, Hanyang University, Ansan 426-791, Republic of Korea;

    School of Advanced Materials Science and Engineering, Sungkyunkwan University, 300 Cheoncheon-dong, Jangan-gu, Suwon 440-746, Republic of Korea;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    Copper nanopaste; Screen printing; Atmospheric-pressure plasma; Plasma sintering;

    机译:铜纳米膏;丝网印刷;大气压等离子体;等离子烧结;

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