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机译:具有CMOS兼容工艺的具有通用高kappa栅极电介质的自对准反相沟道n-InGaAs,p-GaSb和p-Ge MOSFET
Natl Taiwan Univ, Grad Inst Appl Phys, Taipei 10764, Taiwan|Natl Taiwan Univ, Dept Phys, Taipei 10764, Taiwan;
Natl Taiwan Univ, Grad Inst Appl Phys, Taipei 10764, Taiwan|Natl Taiwan Univ, Dept Phys, Taipei 10764, Taiwan;
Natl Tsing Hua Univ, Dept Phys, Hsinchu, Taiwan;
Natl Taiwan Univ, Grad Inst Appl Phys, Taipei 10764, Taiwan|Natl Taiwan Univ, Dept Phys, Taipei 10764, Taiwan;
Natl Tsing Hua Univ, Dept Mat Sci & Engn, Hsinchu, Taiwan;
Natl Tsing Hua Univ, Dept Mat Sci & Engn, Hsinchu, Taiwan;
Natl Tsing Hua Univ, Dept Mat Sci & Engn, Hsinchu, Taiwan;
Natl Taiwan Univ, Grad Inst Elect Engn, Taipei 10764, Taiwan;
Natl Cent Univ, Dept Elect Engn, Jhongli, Taiwan;
Natl Nano Device Labs NDL, Hsinchu, Taiwan;
Air Force Res Lab, Dayton, OH USA;
Natl Cent Univ, Dept Elect Engn, Jhongli, Taiwan;
Natl Tsing Hua Univ, Dept Phys, Hsinchu, Taiwan;
Natl Taiwan Univ, Grad Inst Appl Phys, Taipei 10764, Taiwan|Natl Taiwan Univ, Dept Phys, Taipei 10764, Taiwan;
Rare earth oxide; Common gate stacks; III-V; GaSb; Ge; CMOS;
机译:具有p-Ge和n-InGaAs MOSFET的高性能CMOS逻辑应用研究
机译:CMOS兼容的自对准In 0.53 sub> Ga 0.47 sub> As MOSFET,栅极长度低至30 nm
机译:通过键合用于22-nm节点的自对准平面双栅极MOSFET,具有金属栅极,高kappa $电介质和金属源极/漏极
机译:使用MBE-Al_2O_3 / Ga_2O_3(Gd_2O_3)和ALD-Al_2O_3作为栅极电介质的自对准反相沟道In_(0.75)Ga_(0.25)As MOSFET
机译:具有高kappa栅极堆叠的III-V p-MOSFET的开发,用于未来的CMOS应用。
机译:使用溶液加工的聚合物栅极电介质自对准顶栅金属氧化物薄膜晶体管
机译:CmOs兼容的垂直mOsFET和逻辑门,具有降低的寄生电容。