Silicon MEMS acceleration switch with high reliability using hooked latch

摘要

In this study, a MEMS acceleration switch using mechanical hooked latch is designed, fabricated, and measured. A mechanical latching mechanism and switching characteristic are analyzed using FEM simulation. The acceleration switch with a size of 1.8 x 3.2 x 0.55 mm(3) was fabricated using a Silicon-on-Glass (SiOG) process. A resonance frequency of the fabricated switch and an acceleration threshold are measured to be 1.022 kHz and 43.7 g, respectively. The fabricated switch is latched when an applied external acceleration is higher than the threshold value of 43.7 g. After latching "on", the "on" state of the switch is reliably sustained regardless of the applied external acceleration. (C) 2015 Elsevier B.V. All rights reserved.