MEMS Lubricants Based on Bound and Mobile Phases of Hydrocarbon Compounds: Film Deposition and Performance Evaluation

摘要

The concept of a thin layer of mobile hydro carbon-based lubricant providing protection by replenishment to a surface already protected by a chemically bound material has been explored for the first time, for application to silicon-based microelectromechanical (MEMS) systems. Several bound/mobile pairs of lubricants were evaluated to study the effects of bound phase end group and mobile phase chemical functionality on wettability and performance. The bound species studied were derived from 1-decanol and 1,7-heptanediol. Mobile phases in vestigated were, a pentaerythritol ester, a multiply alkylated cyclopentane, Pennzane, and a polysilane developed for spacecraft application. Hydrocarbon lubricant performance was evaluated using electrostatic motors run in dry air, and was compared with that provided by Fomblin Zdol under identical conditions. Motors with hydrocarbon coatings showed substantial improvement in performance over uncoated motors, and for some bound/mobile pairs, was equal to Zdol within experimental error. We believe that for silicon-based devices, hydrocarbon coatings will be preferable at least for some applications, as the degradation observed due to aging of a fluorinated lubricant in direct contact with a silicon surface is absent.