Single- and Triaxis Piezoelectric-Bimorph Accelerometers

摘要

This paper describes the novel single- and triaxis piezoelectric-bimorph accelerometers that are built on parylene beams with ZnO films. The unamplified sensitivity and the minimum detectable signal of the fabricated single-axis accelerometer are measured to be 7.0 mV/g and 0.01 g, respectively, over a frequency range from 60 Hz to subhertz. The linearity of the sensitivity as a function of acceleration is measured to be 0.9% in the full scale. A highly symmetric quad-beam bimorph structure with a single proof mass is used for triaxis acceleration sensing and is demonstrated to produce high sensitivity, low cross-axial sensitivity, and good linearity, all in a compact size. The unamplified sensitivities of the $X$-, $Y$-, and $Z$ -axis electrodes (of the triaxis accelerometer) in response to the accelerations in $X$-, $Y$-, and $Z$-axes are 0.93, 1.13, and 0.88 mV/g, respectively. The worst-case minimum detectable signal of the triaxis accelerometer is measured to be 0.04 g over a bandwidth ranging from subhertz to 100 Hz. The cross-axial sensitivity among the $X$ -, $Y$-, and $Z$ -axis electrodes is less than 15% in the triaxis accelerometer. The theoretical analyses of the charge sensitivities and resonant frequencies along with the effects of residual stress on the charge sensitivities are presented for both the single- and triaxis accelerometers.$hfill$ [1686]