High-Frequency AlN-on-Silicon Resonant Square Gyroscopes

摘要

This letter reports, for the first time, on a high-frequency resonant square micro-gyroscope using piezoelectric transduction. Degenerate pairs of orthogonal flexural resonance modes are used to provide energy exchange paths for the Coriolis-based resonant gyroscope in response to $z$-axis rotation. Aluminum nitride thin films have been used to provide highly efficient electromechanical transduction for drive and sense modes without requiring any dc polarization voltage for operation. A proof-of-concept design consisting of a 300 $mu{rm m}times,$300 $mu{rm m}$ square gyro shows linear rate sensitivity of 20.38 $mu{rm V}/^{circ}/{rm s}$ when operating in its first flexural mode at ${sim}{rm 11}~{rm MHz}$ .