Lateral Contact Three-State RF MEMS Switch for Ground Wireless Communication by Actuating Rhombic Structures

摘要

A laterally actuated three-state RF microelectromechanical systems switch for ground wireless communication applications is proposed, fabricated, and tested. By electrostatically actuating a rhombic beam, the proposed switch can not only realize the off-state to on -state shifting but also provide an additional deep off state. The switch was fabricated by silicon on glass (SOG) bulk silicon micromachining. The 2- $muhbox{m}$-thick gold electroplating layers were introduced in the SOG process to enhance the performance of lateral contacts. The off-state and deep- off-state isolations of the prototype switch were measured to be $-$67.6 dB and $-$ 72.2 dB at 0.9 GHz and $-$48.3 dB and $-$53.0 dB at 6 GHz, respectively. The measured insertion loss is $-$0.13 dB at 0.9 GHz and $-$ 0.38 dB at 6 GHz, respectively. The measured actuation voltage is 78 V. The switching-on and switching-off response times are 72 and 64 $muhbox{s}$, respectively.$hfill$[2012-0148]