Implementing automated defect inspection to enhance foundry yields

摘要

In the competitive semiconductor environment, manufacturers must be able to ramp new processes quickly and maintain high yields during production. Fast ramp-up and high yields are especially critical for foundries, which manufacture a greater variety of products with shorter production runs than traditional IDMs. When device runs are limited, even relatively short-lived ramp problems or process excursions can reduce revenues significantly or even result in losses.