In situ method of densification for powder-based piezoelectric thick films for microelectromechanical system applications

摘要

Piezoelectric (PZT) (Pb(Zr0.52Ti0.48)O3) thick film-based microtransducers demonstrate excellent piezoelectric performances. PZT thick films onnSi-based substrate can be used as piezoelectric actuators and sensors with the introduction of microelectromechanical system technology and thenscreen printing method. However, the thick films made just by the screen printing method have high porosity compared with bulk product, and thenPZT thick films on Si-based substrate have problems regarding degradation of active materials and interface properties owing to inter-diffusion ornreaction between Si substrate and PZT materials at high temperature for sintering. Thus, the authors have fabricated screen printed PZT thick filmsnon Si substrate using the screen printing method and sol infiltration for enhancing densification. Ethanol-based photo-cross-linkable sol andnconventional diol-based sol were used to compare influence of patterning process. Thick films with relative high densities at low temperature,n8008C and without inter-diffusion and reaction between the layers and thick film were accomplished. Also, it was revealed that the PZT thicknfilm treated by ethanol-based photo-cross-linkable sol showed better electrical properties as well as excellent patternability.