Nonparametric identification of a micro-electromechanical resonator

摘要

This work presents a nonparametric identification method to study the nonlinear response of a micro-electromechanical system (MEMS) resonator. The MEMS resonator is a clamped-clamped microbeam fabricated for out-of-plane motion, which is dominated by the cubic nonlinearity due to mid-plane stretching while actuated by electrostatic forces. Experimental measurements show hardening behavior in the frequency-response of the first symmetric mode of the resonator due to the dominant cubic nonlinearity. Modeling the dynamics of the microbeam using a nonparametric identification method is shown to be very effective in capturing the characteristics of the complex nonlinear system at different electrostatic AC and DC voltages.