THE DIRECT MEASUREMENT OF LINEWIDTH USING AN ATOMIC FORCE MICROSCOPE

Yu. A. Novikov; A. V. Rakov; P. A. Todua

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THE DIRECT MEASUREMENT OF LINEWIDTH USING AN ATOMIC FORCE MICROSCOPE

机译：用原子力显微镜直接测量线宽

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摘要

A method for directly measuring linewidth with an atomic force microscope using the first derivative of the signal is presented. The method showed that it is possible to make a direct measurement of the size of the upper base of a trapezoidal protrusion down to 30 nm.

机译：提出了一种使用原子力显微镜使用信号的一阶导数直接测量线宽的方法。该方法表明可以直接测量低至30 nm的梯形凸起的上底的尺寸。

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来源
《Measurement techniques》 |2008年第5期|p.470-474|共5页
作者
Yu. A. Novikov; A. V. Rakov; P. A. Todua;
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作者单位

A. M. Prokhorov Institute of General Physics, Russian Academy of Sciences;

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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
原文格式 PDF
正文语种 eng
中图分类计量学;
关键词
atomic force microscope; linewidth;

机译：原子力显微镜;线宽;
入库时间 2022-08-17 13:11:16

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1. Traceable calibration of critical-dimension atomic force microscope linewidth measurements with nanometer uncertainty [J] . R. G. Dixson, R. A. Allen, W. F. Guthrie, Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures . 2005,第6期

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2. Estimation of Three-Dimensional Atomic Force Microscope Tip Shape from Atomic Force Microscope Image for Accurate Measurement [J] . Yasuhiko Harada, Hayato Sone, Sumio Hosaka Japanese journal of applied physics . 2008,第7issue3期

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3. Direct measurement of single-molecule visco-elasticity in atomic force microscope force-extension experiments [J] . Bippes CA, Humphris ADL, Stark M, European Biophysics Journal . 2006,第3期

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4. Atomic force microscope (AFM) analysis of photoresist test structures for use in SEM as in-house linewidth standards [C] . Donald A. Chernoff, Advanced Surface Microscopy, Inc., Integrated Circuit Metrology, Inspection, and Process Control IX . 1995

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5. Direct Measurement of Rupture Force of Single Triazole Molecule by Atomic Force Microscope and Solid Phase Synthesis of Monodisperse Polyethylene Glycols [D] . Khanal, Ashok. 2018

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8. Direct Measurement of Plowing Friction and Wear of a Polymer Thin Fill Using the Atomic Force Microscope, Reprinted from the Journal of Materials Research, Vol. 16, 1487-1492, 2001 [R] . Du, B., VanLandingham, M. R., Zhang, Q., 2000

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THE DIRECT MEASUREMENT OF LINEWIDTH USING AN ATOMIC FORCE MICROSCOPE

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