Characterisation of YSZ layers Deposited on Y_2O_3 Buffered Textured Tapes for Coated Conductors

摘要

Yttria-stabilized zirconia (YSZ) films were deposited on Y_2O_3/Ni-5at.%W substrates serving as the barrier layers for coated conductors by reel-to-reel direct-current (D.C.) magnetron reactive sputtering. The deposition parameters, such as the substrate temperature and tape moving speed, were systematically investigated. X-ray diffraction analysis confirmed that optimized YSZ/Y_2O_3 buffer layers showed excellent in-plane and out-of-plane textures. Atomic force microscope revealed a smooth, dense and crack-free surface. The subsequent CeO_2 cap layer and 1 um-thick YBa_2Cu_3O_(7-δ) film sequentially prepared, showing the critical current density J_c under 77K, self-field of 1.4MA/cm~2.