Meter-long CeO_2/YSZ/Y_2O_3 buffer layers for YBCO coated conductors using DC reactive sputtering

摘要

This paper reports CeO_2/YSZ/Y_2O_3 buffer layers deposited on biaxially textured NiW substrates by DC reactive sputtering in a reel-to-reel system. The effect of partial pressure of water vapor (P _(H2O)) on surface morphology and orientation of the Y_2O _3 films was examined. The obtained CeO_2/YSZ/Y _2O_3 buffer layers exhibit a highly biaxial texture, with in- and out-of-plane FWHM values respectively in the range of 6.0-7.0° and 4.5-5.5°. Crystallographic consistency of CeO_2/YSZ/Y _2O_3 along meter length is excellent. Atomic force microscope observation (AFM) reveals a smooth, continuous and crack-free surface with a Root-mean-square roughness (RMS) lower than 10 nm.