Quadrant Protrusion Measurement of Ultra-Precision Machine Tool by Real-Time Position Capturing Method

摘要

This paper describes a development of a real-time position capturing method in which branched encoder signals are recorded in external data storage, to evaluate motion trajectories of the XYZ table on ultra-precision machine tool. The method allows the capturing with minimal modification to the machine: without any additional sensors. In the previous study we generated a non-axisymmetric aspherical optical element by XZC-axis simultaneous numerical controlled ultra-precision turning process with 2 μm form deviation, the reason of form accuracy degradation wasn't identified. Using the developed system, motion accuracy of ultra-precision machine tool is confirmed. The machine tool moves along circular trajectory in three coordinate planes (XY, YZ and ZX) respectively. The rotation direction of circle is set clock wise and counter clock wise. The circle processing interpolation command by linear interpolation control code and circular interpolation control code. The results showed the effectiveness of the proposed method for performance evaluations of machine tools, by revealing the influence of trajectory parameters on the magnitudes of quadrant protrusions.