Modern Techniques for Automated Acquiring and Processing Data of Diffraction Electron Microscopy for Nano-Materials and Single-Crystals

摘要

Progress in modern science and technology is impossible without the use of new materials, which include nanoparticles and single crystals. Existing approaches in the field of computer vision are difficult to apply to the processing of diffraction patterns, which contain information about the parameters of the fine structure of nanostructured and single-crystal materials. The aim of the work was to develop modern computer-aided techniques that, interacting with the software of the electron microscope, automatically receive and process the information contained in electron diffraction patterns. Replacing the diffraction pattern obtained by a transmission electron microscope with a three-dimensional relief makes it possible to reduce the problem to the solution of the optimization problem. This approach allows not only automating the process of scientific research, but also significantly reduces the time for obtaining the result and increases its accuracy. The application of the proposed approach is demonstrated in measuring the misorientation angles of large single-crystal tungsten ingots, which are obtained by the plasma-induction growing technology.