Synthesis and characterization of ZnO-In_2O_3 junction structure

摘要

Rod-shaped ZnO-In_2O_3 junction structure was obtained by bottom up approach of nanostructure fabrication and characterization. In_2Zn_3 alloy was evaporated in a tube furnace of 1150 ℃ temperature and 5 x 10~(-1) Torr vacuum. The deposit collected on silicon wafer placed down stream of the tube furnace was examined by scanning electron microscope (SEM), energy dispersive x-ray spectroscopy (EDS), and transmission electron microscopy (TEM). SEM and EDS results proved the existence of rod-shaped ZnO-In_2O_3 junction structure. TEM analysis revealed the orientation relationship between ZnO and In_2O_3. It is suggested that this structure is formed via vapor-liquid-solid process and the suitable combination of source temperature, tube vacuum, and substrate temperature is the key for the formation of such novel structure. This report demonstrates the possibility of fabricating junction structure by bottom up approach, expanding its capability of fabricating structure with desired properties.