Efficient Resonance Management in Ultrahigh-Q 1D Photonic Crystal Nanocavities Fabricated on 300 mm SOI CMOS Platform

摘要

Photonic crystal (PhC) nanocavities have demonstrated unique capabilities interms of light confinement and manipulation. As such, they are becomingattractive for developing novel resonance-based photonic integrated circuits(PICs). Here two essential challenges arise however—how to realize ultrahighquality factor (Q) PhC cavities using standard fabrication processescompatible with large volume fabrication, and how to efficiently integratethem with existing building blocks. In this work, ultrahigh-Q one-dimensional(1D) PhC nanocavities fabricated on a 300 mm silicon-on-insulator wafer aredemonstrated by optical lithography, with a record Q factor of up to 0.84million. Moreover, efficient mode management in those cavities is shown bycoupling them with an access waveguide, realizing two critical components:notch filters and narrow-band reflectors. In particular, they allow bothsingle-wavelength and multi-wavelength operation, at the desired resonantwavelengths, over a broad wavelength range (>100 nm). Compared totraditional cavities, this offers a fantastic strategy for implementingresonances precisely in PIC designs with more freedom in terms ofwavelength selectivity and the control of mode number. Given theircompatibility with optical lithography and compact footprint, the realized 1DPhC nanocavities will be of profound significance for designing compact andnovel resonance-based photonic components on large scale.