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机译:通过使用SF_6:C_4F_8进行干法刻蚀并在Si基板上进行自限热氧化来制造高纵横比的纳米线
Department of Electrical and Computer Engineering, The Ohio State University, Columbus,Ohio 43210-1272 Chemical and Biomolecular Engineering, Johns Hopkins University (JHU), 3400 N. Charles Street, 125 Maryland Hall, Baltimore,MD 21218;
rnDepartment of Electrical and Computer Engineering, The Ohio State University, Columbus,Ohio 43210-1272;
rnDepartment of Electrical and Computer Engineering, The Ohio State University, Columbus,Ohio 43210-1272 Northrop Grumman Electronic Systems, 1580-A West Nursery Road, Linthicum, Maryland 21090;
rnDepartment of Electrical and Computer Engineering, The Ohio State University, Columbus,Ohio 43210-1272;
rnDepartment of Electrical and Computer Engineering, The Ohio State University, Columbus,Ohio 43210-1272 Department of Physics, The Ohio State University, Columbus, OH 43210-1272;
rnNaval Research Laboratory, Washington, DC 20375-5347;
rnDepartment of Electrical and Computer Engineering, University of Illinois at Urbana-Champaign, Urbana,Illinois 61801;
机译:通过使用SF6:C4F8进行干法刻蚀并在Si基板上进行自限热氧化来制造高纵横比的纳米线
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