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Study of techniques for improving emission uniformity of gated CuO nanowire field emitter arrays

机译:提高门控CuO纳米线场发射体阵列发射均匀性的技术研究

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摘要

In this study, the fabrication technologies for a gated CuO nanowire field emitter arrays were investigated. Fabrication process was optimized to achieve uniform emission. More uniform emission is achieved from the CuO nanowire field emitter arrays prepared with an additional lift-off process. The improved uniformity is attributed to the removal of etch residues as well as higher resistance between the CuO nanoemitter and cathode electrode. The study shows that the gated CuO nanowire field emitter arrays have potential for application in high resolution field emission display.
机译:在这项研究中,研究了门控CuO纳米线场致发射器阵列的制造技术。优化制造工艺以实现均匀发射。通过额外的剥离工艺制备的CuO纳米线场致发射体阵列可实现更均匀的发射。改善的均匀性归因于蚀刻残留物的去除以及CuO纳米发射极与阴极之间更高的电阻。研究表明,门控CuO纳米线场致发射器阵列具有在高分辨率场致发射显示器中应用的潜力。

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  • 来源
    《Journal of Vacuum Science & Technology》 |2010年第2期|C2C45-C2C48|共4页
  • 作者单位

    State Key Laboratory of Optoelectronic Materials and Technologies and Guangdong Provincial Key Laboratory of Display Materials and Technologies, Sun Yat-sen University, Guangzhou 510275,People's Republic of China;

    State Key Laboratory of Optoelectronic Materials and Technologies and Guangdong Provincial Key Laboratory of Display Materials and Technologies, Sun Yat-sen University, Guangzhou 510275,People's Republic of China;

    State Key Laboratory of Optoelectronic Materials and Technologies and Guangdong Provincial Key Laboratory of Display Materials and Technologies, Sun Yat-sen University, Guangzhou 510275,People's Republic of China;

    State Key Laboratory of Optoelectronic Materials and Technologies and Guangdong Provincial Key Laboratory of Display Materials and Technologies, Sun Yat-sen University, Guangzhou 510275,People's Republic of China;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
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