首页> 外文期刊>Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures >Molecular beam epitaxy grown 0.6 eV n/p lnPAs/InGaAs/InAlAs double heterostructure thermophotovoltaic devices using carbon as the p-type dopant
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Molecular beam epitaxy grown 0.6 eV n/p lnPAs/InGaAs/InAlAs double heterostructure thermophotovoltaic devices using carbon as the p-type dopant

机译:使用碳作为p型掺杂剂生长的分子束外延生长0.6 eV n / p / n lnPAs / InGaAs / InAlAs双异质结构热光电器件

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摘要

Beryllium (Be) has been previously shown to be an adequate p-type dopant for molecular beam epitaxy (MBE) grown 0.6 eV n/p InGaAs/InPAs double heterostructure thermophotovoltaic (TPV) devices. However, due to environmental, safety, and health operational concerns caused by airborne exposure to Be during cleaning operations in a MBE system, carbon (C) was investigated as a p-type dopant substitute. However, due to the amphoteric nature of C, it incorporates on the group-III site in InGaAsP material with high P content, making it n type. Therefore, to grow the n/p InGaAs double heterostructure TPV device, InAlAs was developed as the back surface field (BSF). By using C as the p-type dopant and InAlAs as the BSF, MBE grown 0.6 eV n/p InPAs/InGaAs/InAlAs double heterostructure TPV devices were successfully made. The demonstrated room temperature reverse saturation current density (j(0)) value from this MBE grown device was similar to 9 mu A/cm(2). This j(0) value was only three times larger than the previous best MBE grown 0.6 eV n/p InGaAs/InPAs double heterostructure TPV device using Be as the p-type dopant. Internal quantum efficiency evidence suggested that, by improving the baseBSF interface for the device having the InAlAs BSF and C p-type doping, j(0) values lower than the previous best MBE grown TPV material were possible. Therefore, C was found to,be a promising alternative to Be in 0.6 eV n/p InPAs/InGaAs/InAlAs double heterostructure TPV devices. (c) 2006 American Vacuum Society.
机译:铍(Be)先前已被证明是生长0.6 eV n / p / n InGaAs / InPAs双异质结构热光电(TPV)器件的分子束外延(MBE)的适当p型掺杂剂。但是,由于在MBE系统的清洁操作过程中,机载空气中暴露于Be引起环境,安全和健康方面的问题,因此对碳(C)作为p型掺杂剂的替代品进行了研究。然而,由于C的两性性质,它以高P含量掺入InGaAsP材料的III组位点,成为n型。因此,为了生长n / p / n InGaAs双异质结构TPV器件,开发了InAlAs作为背表面场(BSF)。通过使用C作为p型掺杂剂和InAlAs作为BSF,成功制备了生长了0.6 eV n / p / n InPAs / InGaAs / InAlAs双异质结构TPV器件的MBE。从该MBE生长设备获得的室温反向饱和电流密度(j(0))值与9μA / cm(2)相似。该j(0)值仅比使用Be作为p型掺杂剂生长的0.6 eV n / p / n InGaAs / InPAs双异质结构TPV器件的先前最佳MBE大三倍。内部量子效率证据表明,通过改善具有InAlAs BSF和C p型掺杂的器件的baseBSF接口,可以使j(0)值低于以前最好的MBE生长的TPV材料。因此,发现在0.6 eV n / p / n InPAs / InGaAs / InAlAs双异质结构TPV器件中,C可以替代Be。 (c)2006年美国真空学会。

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