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首页> 外文期刊>Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films >Arcing from coated surfaces: Test facility development and coating deposition using ion plating techniques
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Arcing from coated surfaces: Test facility development and coating deposition using ion plating techniques

机译:涂层表面起弧:使用离子镀技术测试设备的开发和涂层沉积

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Electrical arcing from surfaces is recognized as a potentially deleterious source of plasma impurities for next generation fusion devices. Surface coatings and/or surface conditioning techniques can be applied to reduce the amount of such arc generated impurity atoms. In order to investigate the arcing phenomenon and to assess the arcing performance of various coatings and coating techniques, a unique experimental facility is being developed. This dual purpose facility, developed around an existing ion plating system, allows for the convenient joint studies of arcing phenomenon and coating deposition processes. Completed work includes the construction of an arcing test fixture for study of coating performance in a ‘‘glow discharge to biased surface’’ configuration, and the deposition of selected coating materials using ion plating techniques. Work is continuing toward the development of arc testing and diagnostic instrumentation.
机译:来自表面的电弧被认为是下一代融合设备潜在的等离子体杂质有害来源。可以应用表面涂层和/或表面调节技术来减少这种电弧产生的杂质原子的数量。为了研究电弧现象并评估各种涂层和涂层技术的电弧性能,正在开发一种独特的实验设备。围绕现有离子镀系统开发的这种双重用途设施,可以方便地共同研究电弧现象和涂层沉积过程。完成的工作包括建造一个电弧试验夹具,以研究“辉光放电到偏置表面”配置中的涂层性能,以及使用离子镀技术沉积选定的涂层材料。电弧测试和诊断仪器的开发仍在继续。

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