SIMPLE MODELING APPROACH FOR LINE IMPEDANCE OF ON-CHIP CMOS INTERCONNECTS

摘要

Simple and accurate closed-form model enabling to calculate frequency-dependent distributed inductance and associated distributed series resistance per-unit-length of single on-chip interconnects on a lossy silicon substrate is presented. The closed-form formulas for the frequency-dependent series impedance parameters are obtained using a closed-form integration method and the vector magnetic potential equation. The proposed frequency-dependent inductance L(ω) and resistance R(ω) per-unit-length formulas are shown to be in good agreement with the electromagnetic solutions.