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The effect of surface treatments on the field emission characteristics of patterned carbon nanotubes on KOVAR substrate

机译:表面处理对KOVAR衬底上构图的碳纳米管场发射特性的影响

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The field emission characteristics of patterned carbon nanotubes (CNTs) the average diameter of which is 16 nm cathodes on substrates with different surface treatments were investigated. The surface treatments of the substrate were performed by nickel electroless plating and palladium coating, which is an activation procedure of electroless plating. CNTs were patterned on the surface-treated substrate with radius of 200 μm through conventional photolithography process. Two deposition methods, electrophoresis deposition and spray deposition, were used to investigate the effects of deposition methods on field emission characteristics of the cathodes. It was revealed that the two deposition methods showed similar turn-on field trends, which means that the different surface morphologies of the substrates have more influence on the field emission characteristics than the different deposition methods performed in this study. Through the surface treatments, the roughness of the surface increased and cathodes with a high roughness factor showed better field emission characteristics compared to non-treated ones.
机译:研究了平均直径为16 nm阴极的图案化碳纳米管(CNT)在具有不同表面处理的基板上的场发射特性。通过镍化学镀和钯涂覆来执行基板的表面处理,这是化学镀的活化过程。通过常规的光刻工艺在表面处理过的基板上以200μm的半径对CNT进行构图。电泳沉积和喷涂沉积两种沉积方法被用来研究沉积方法对阴极场发射特性的影响。结果表明,两种沉积方法显示出相似的开启场趋势,这意味着与本研究中执行的不同沉积方法相比,衬底的不同表面形态对场发射特性的影响更大。通过表面处理,与未处理的阴极相比,表面的粗糙度增加,具有高粗糙度系数的阴极显示出更好的场发射特性。

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