Computer Aided Modeling of a New Microwave Plasma Cavity with the H-type Excitation at Microwave Frequency

摘要

Computer modeling of the semi-lumped H field-generating multi helical coil, which can be used for generation of H-type discharges at microwave frequencies is presented in this paper. The aim of modeling was to support the design of model plasma source based upon a set of realistic dimensions, which should enable excitation of maximal values of H field at the axis of the discharge tube. As a result, a Microwave-Driven Inductively Coupled Plasma cavity (MICP) has been constructed and its assembly is presented in this paper. The new cavity can be applied in the emission and mass spectroscopy but also can find another applications where maximum H-type coupling is essential.