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Modeling The Electromagnetic Fields And The Plasma Excitation In Moderate Pressure Microwave Cavity Plasma Sources

机译：在中等压力微波腔等离子体源中模拟电磁场和等离子体激发

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《》|1994年|P.77-77|共1页
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Tan; W.; Grotjohn; T.A.;
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中图分类无线电电子学、电信技术;
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2. Design and characterization of an electromagnetic-resonant cavity microwave plasma reactor for atmospheric pressure carbon dioxide decomposition [J] . Mohsenian Sina, Sheth Shyam, Bhatta Saroj, Plasma processes and polymers . 2019,第2期

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4. Modeling of moderate pressure H2/CH4 and Ar/H_2/CH_4 microwave plasmas used for diamond deposition [C] . K. Hassouni, A. Gicquel, X. Duten, International Conference on Phenomena in Ionized Gases;ICPIG 2005 . 2005

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5. Modeling of hydrogen-based plasmas in microwave plasma-assisted chemical vapor deposition reactors at moderate pressures. [D] . Meierbachtol, Collin Stephen. 2013

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6. The Diffusion of Charged Particles in Collisional Plasmas: Free and Ambipolar Diffusion at Low and Moderate Pressures [O] . A. V. Phelps 1990

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7. Analytic model for electromagnetic fields in the bubble regime of plasma wakefield in non-uniform plasmas [O] . Golovanov, A. A., Kostyukov, I. Yu., Thomas, J., 2017

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8. Nonequilibrium Model for a Moderate Pressure Hydrogen Microwave Discharge Plasma [R] . Scott, C. D. 1993

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Modeling The Electromagnetic Fields And The Plasma Excitation In Moderate Pressure Microwave Cavity Plasma Sources

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