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机译:用于制造微型和纳米器件的纳米压印光刻工艺链
Paul Scherrer Institute, Laboratory for Micro and Nanotechnology, 5232 Villigen PSI, Switzerland;
Paul Scherrer Institute, Laboratory for Micro and Nanotechnology, 5232 Villigen PSI, Switzerland,University of Bern, Gerontechnology and Rehabilitation Group, 3010 Bern, Switzerland;
University of Applied Sciences and Arts, Institute of Polymer Engineering, 5210 Windisch, Switzerland;
Paul Scherrer Institute, Laboratory for Micro and Nanotechnology, 5232 Villigen PSI, Switzerland,University of Applied Sciences and Arts, Institute of Polymer Engineering, 5210 Windisch, Switzerland;
nanoimprint lithography; injection molding; microcantilever; micromechanical element; polymer film;
机译:使用纳米压印光刻技术对刺激响应性聚合物进行微细加工和纳米加工
机译:使用纳米压印光刻技术对刺激响应性聚合物进行微细加工和纳米加工
机译:固溶氧化锌和纳米压印光刻技术制造鳍状薄膜晶体管
机译:用于制造微型和纳米器件的纳米压印光刻工艺链
机译:纳米压印光刻技术在纳米器件和纳米加工中的应用。
机译:用于纳米器件制造的纳米压印光刻
机译:用于制造微型和纳米器件的纳米压印光刻工艺链