机译:使用有源悬臂在分子抗蚀剂上进行高级电场扫描探针光刻
Ilmenau University of Technology, Institute of Micro and Nanoelectronics, Department of Micro- and Nanoelectronic Systems, Faculty of Electrical Engineering and Information Technology, Gustav-Kirchhoff-Strasse 1, Ilmenau 98693, Germany;
Ilmenau University of Technology, Institute of Micro and Nanoelectronics, Department of Micro- and Nanoelectronic Systems, Faculty of Electrical Engineering and Information Technology, Gustav-Kirchhoff-Strasse 1, Ilmenau 98693, Germany;
Ilmenau University of Technology, Institute of Micro and Nanoelectronics, Department of Micro- and Nanoelectronic Systems, Faculty of Electrical Engineering and Information Technology, Gustav-Kirchhoff-Strasse 1, Ilmenau 98693, Germany;
Ilmenau University of Technology, Institute of Micro and Nanoelectronics, Department of Micro- and Nanoelectronic Systems, Faculty of Electrical Engineering and Information Technology, Gustav-Kirchhoff-Strasse 1, Ilmenau 98693, Germany;
Ilmenau University of Technology, Institute of Micro and Nanoelectronics, Department of Micro- and Nanoelectronic Systems, Faculty of Electrical Engineering and Information Technology, Gustav-Kirchhoff-Strasse 1, Ilmenau 98693, Germany;
Ilmenau University of Technology, Institute of Micro and Nanoelectronics, Department of Micro- and Nanoelectronic Systems, Faculty of Electrical Engineering and Information Technology, Gustav-Kirchhoff-Strasse 1, Ilmenau 98693, Germany,Nano Analytik GmbH, Ehrenbergstrasse 11, Ilmenau 98693, Germany;
Ilmenau University of Technology, Institute of Micro and Nanoelectronics, Department of Micro- and Nanoelectronic Systems, Faculty of Electrical Engineering and Information Technology, Gustav-Kirchhoff-Strasse 1, Ilmenau 98693, Germany;
Ilmenau University of Technology, Institute of Micro and Nanoelectronics, Department of Micro- and Nanoelectronic Systems, Faculty of Electrical Engineering and Information Technology, Gustav-Kirchhoff-Strasse 1, Ilmenau 98693, Germany;
Ilmenau University of Technology, Institute of Micro and Nanoelectronics, Department of Micro- and Nanoelectronic Systems, Faculty of Electrical Engineering and Information Technology, Gustav-Kirchhoff-Strasse 1, Ilmenau 98693, Germany,Nano Analytik GmbH, Ehrenbergstrasse 11, Ilmenau 98693, Germany;
Ilmenau University of Technology, Institute of Micro and Nanoelectronics, Department of Micro- and Nanoelectronic Systems, Faculty of Electrical Engineering and Information Technology, Gustav-Kirchhoff-Strasse 1, Ilmenau 98693, Germany;
Ilmenau University of Technology, Institute of Micro and Nanoelectronics, Department of Micro- and Nanoelectronic Systems, Faculty of Electrical Engineering and Information Technology, Gustav-Kirchhoff-Strasse 1, Ilmenau 98693, Germany,Nano Analytik GmbH, Ehrenbergstrasse 11, Ilmenau 98693, Germany;
Nano Analytik GmbH, Ehrenbergstrasse 11, Ilmenau 98693, Germany;
Ilmenau University of Technology, Institute of Micro and Nanoelectronics, Department of Micro- and Nanoelectronic Systems, Faculty of Electrical Engineering and Information Technology, Gustav-Kirchhoff-Strasse 1, Ilmenau 98693, Germany;
nanolithography; scanning probe lithography; molecular glass resist; calixarene resist; self-actuating piezoresistive cantilever; active cantilever;
机译:无悬臂扫描探针光刻中弹性型金字塔笔阵列的变形
机译:悬臂式扫描探头光刻的最新进展:高通量,空间狭窄的纳米结构和超越合成
机译:使用热补偿悬臂电阻探针进行扫描热显微镜的高温成像
机译:使用有源悬臂在分子抗蚀剂上进行高级电场扫描探针光刻
机译:使用无悬臂扫描探针光刻的高通量材料合成的工具和方法
机译:使用锐钛矿-金红石转变的先进扫描探针光刻技术以产生局部化的TiO2纳米棒
机译:适用于快速原子力显微镜,扫描探针光刻和阵列操作的自转换,自感应悬臂的偏转效率
机译:扫描探针光刻。 1.扫描隧道显微镜诱导的自组装正烷硫醇单层抗蚀剂的光刻。