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机译:选择性湿法刻蚀工艺的优化,以制造高纵横比和均匀的多层光栅参考材料
Tongji University, Institute of Precision Optical Engineering, School of Physics Science and Engineering, Shanghai, China;
Tongji University, Institute of Precision Optical Engineering, School of Physics Science and Engineering, Shanghai, China;
Tongji University, Institute of Precision Optical Engineering, School of Physics Science and Engineering, Shanghai, China;
Tongji University, Institute of Precision Optical Engineering, School of Physics Science and Engineering, Shanghai, China,Tongji University, School of Aerospace Engineering and Applied Mechanics, Shanghai, China;
multilayer grating; selective wet etching; aspect ratio; etching uniformity; linewidth scale;
机译:使用近场扫描光学光刻和硅各向异性湿法刻蚀工艺制备高纵横比的硅纳米结构
机译:飞秒激光辐照和湿法刻蚀并行加工高纵横比全硅凹槽
机译:两步栅极凹陷过程结合了选择性湿法蚀刻和数字湿法蚀刻,用于Inalas / InGaAs基于INP的垫圈
机译:具有3D封装的高密度互连的硅中介层的晶片级湿法高纵横比的硅通孔(TSV)具有高均匀性和低成本
机译:通过聚焦离子束诱导的选择性混合和湿法化学蚀刻形成光通道波导:设计,制造和表征。
机译:通过深反应离子蚀刻制造高纵横比硅光栅
机译:聚二甲基硅氧烷湿法蚀刻微针阵列的三维制造和高纵横比微米