Two- and three-layer composite models were developed using a beam vibration theory, and the models were applied for measuring Young's moduli of thin metallic films. The Cr, Ni, and Co-coated Si wafer composites (two-layer composite) and (Cr/Ti/Si) composites (three-layer composite) were produced by radio-frequency (rf magnetron sputtering and used to test the developed models. Ypung's moduli of (Cr) films obtained by the three-layer composite model agree well with those of (Cr) films obtained by the two-layer composite model, considering (Ti/Si) as the one layer and (Cr) as the other layer. This suggests that moduli of multilayer films may be obtained by using a two-layer composite model repeatedly..
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机译：利用梁振动理论建立了两层和三层复合材料模型，并将其用于测量金属薄膜的杨氏模量。通过射频（射频磁控溅射）生产Cr，Ni和Co涂层的硅片复合材料（两层复合材料）和（Cr / Ti / Si）复合材料（三层复合材料），并用于测试开发的模型。将三层复合模型获得的（Cr）膜的Ypung模量与两层复合模型获得的（Cr）膜的模量很好地吻合，其中（Ti / Si）为一层，（Cr）为这表明可以通过重复使用两层复合模型来获得多层膜的模量。
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