Stressed Solid-phase Epitaxial Growth Of (011) Si

摘要

The solid-phase epitaxial growth kinetics of amorphized (011) Si with application of in-plane [211] uniaxial stress to magnitude of 0.9 ±0.1 GPa were studied. Tensile stresses did not appreciably change the growth velocity compared with the stress-free case, whereas compression tended to retard the growth velocity to approximately one-half the stress-free value. The results are explained using a prior generalized atomistic model of stressed solid-solid phase transformations. In conjunction with prior observations of stressed solid-phase epitaxial growth of (001) Si, it is advanced that the activation volume tensor associated with ledge migration may be substrate orientation-dependent.