Sol-Gel Processing of PNZST Thin Films on Ti/Pt and Ta/Pt Metallizations

摘要

Sol-gel processing parameters of Pb_0·99Zr_0·55Sn_0·37 Ti_0·06Nb_0·02O_3 thin films were studied. Effects of H_2O, HNO_3 and formamide additives on solution Gelation and film properties were investigated. Thin Films were prepared on Ti/Pt and Ta/Pt metallized Si substrates. Film microstructures were character- Ized using SEM, TEM/EDS and XPS. Film Microstructures typically contained 'rosette' struc- Tures. Strain response of the films under applied Electric fields was measured using a double beam Interferometer.