Patent Issued for MEMS-Based Getter Microdevice

摘要

2013 MAR 27 (VerticalNews) -- By a News Reporter-Staff News Editor at Journal of Engineering -- From Alexandria, Virginia, VerticalNews journalists report that a patent by the inventors Garcia-Blanco, Sonia (Enschede, NL); Williamson, Fraser (Enschede, NL); Viens, Jean Francois (Palo Alto, CA), filed on March 11, 2011, was cleared and issued on March 12, 2013.