PbTiO_3 thin films grown by mixed reactive thermal co-evaporation

摘要

This paper describes the growth conditions and the structural characterization of thin films PbTiO_3 elaborated by a mixed reactive thermal co-evaporation. In a same chamber, in oxygen atmosphere, the titanium source is deposited by electron beam evaporation of TiO_2 and the lead source is brought by thermal evaporation of PbO. Crystallographic properties are presented using X-ray diffractometry, morphological aspects are shown by means of electronic and atomic force microscopes (MEB and AFM). The effect of post-annealing on morphology is presented.