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Growth Of Inassb/inpsb Heterojunctions For Mid-ir Detector Applications

机译:用于中红外探测器应用的Inassb / inpsb异质结的生长

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InAsSb/InPSb heterojunctions and InAsSb homojunctions were grown by metalorganic vapor phase epitaxy (MOVPE) on GaSb for potential mid-infrared photodetector applications. Despite the presence of a large miscibility gap for both InAsSb and InPSb alloys, we have grown excellent structural quality epilayers at a growth temperature of 500 ℃ using all-alkyl precursors. Hall effect measurements of p-type InAsSb are complicated by the presence of an n-type accumulation layer at the surface. Mesa diode structures were fabricated by wet chemical etching and optical lithography. Heterojunction devices were shown to have higher R_0A values than homojunction devices at room temperature.
机译:通过在GaSb上的金属有机气相外延(MOVPE)生长InAsSb / InPSb异质结和InAsSb同质结,以用于潜在的中红外光电探测器应用。尽管InAsSb和InPSb合金都存在较大的混溶间隙,但我们在使用全烷基前驱体的生长温度为500℃的条件下仍生长出了优异的结构质量外延层。 p型InAsSb的霍尔效应测量由于表面上存在n型累积层而变得复杂。台面二极管结构是通过湿法化学蚀刻和光学光刻制造的。在室温下,异质结器件显示出比同质结器件更高的R_0A值。

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