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Investigation of semi-insulating oxygen-doped GaAs

机译:半绝缘氧掺杂砷化镓的研究

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We found Oxygen-doped GaAs crystals to be suitable materials for CO_2 laser optical component preparation, with application at 10.6 μm. An optical transmission of 55/100 in the IR spectrum range, between 2 and 15 μm has been reached for such a GaAs type material. The GaAs crystals that we have analysed were grown by two procedures: Horizontal Bridgman(HB) and Liquid Encapsulated Czochralski (LEC). The HB method has been used for obtaining Pure(undoped) crystals, while the oxygen-doped GaAs ingots were grown by LEC techniques. the two types of samples Processed in the same manner as regards mechanical polishing and chemical etching, which were investigated by Hall Measurements, optical transmission spectrometry and elastic recoil detection analysis (ERDS) technique.
机译:我们发现掺氧的GaAs晶体是制备CO_2激光光学组件的合适材料,应用量为10.6μm。对于这种GaAs型材料,在IR光谱范围内的光学透射率为55/100,在2和15μm之间。我们分析的GaAs晶体是通过两种程序生长的:水平Bridgman(HB)和Liquid Encapsulated Czochralski(LEC)。 HB方法已用于获得纯(未掺杂)晶体,而氧掺杂的GaAs锭通过LEC技术生长。两种类型的样品在机械抛光和化学蚀刻方面以相同的方式进行了处理,并通过霍尔测量,光学透射光谱法和弹性反冲检测分析(ERDS)技术进行了研究。

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