Probing thermal conductivity of subsurface, amorphous layers in irradiated diamond

摘要

In this study, we report on the thermal conductivity of amorphous carbon generated in diamond via nitrogen ion implantation (N~(3+) at 16.5 MeV). Transmission electron microscopy techniques demonstrate amorphous band formation about the longitudinal projected range, localized approximately 7μm beneath the sample surface. While high-frequency time-domain thermoreflectance measurements provide insight into the thermal properties of the near-surface preceding the longitudinal projected range depth, a complimentary technique, steady-state thermoreflectance, is used to probe the thermal conductivity at depths which could not otherwise be resolved. Through measurements with a series of focusing objective lenses for the laser spot size, we find the thermal conductivity of the amorphous region to be approximately 1.4 W m~(-1) K~(-1), which is comparable to that measured for amorphous carbon films fabricated through other techniques.