Spectroscopic ellipsometric study on dispersion of optical constants of Gd_2O_3 films

摘要

Electron-beam evaporated Gd_2O_3 films have been characterized by spectroscopic ellipsometry technique. The experimental ellipsometric data have been fitted with theoretical models to derive information on the sample structure and dispersion of the optical constants of bulk Gd_2O_3. Three different dispersion models, proposed so far for amorphous materials have been used for the calculation of the refractive-index dispersion and results obtained from these models have been compared.