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首页> 外文期刊>Journal of Applied Physics >Influence Of Doping Profiles On Coherent Acoustic Phonon Detection And Generation In Semiconductors
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Influence Of Doping Profiles On Coherent Acoustic Phonon Detection And Generation In Semiconductors

机译:掺杂分布对半导体相干声子检测和产生的影响

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The doping profile in different n-doped GaAs homoepitaxial structures grown by molecular beam epitaxy is investigated in the time domain by employing a laser based picosecond ultrasound technique in a contactless and noninvasive way. Experiments based on asynchronous optical sampling employ two femtosecond lasers, which allow us to detect changes in the optical reflectivity over a 1 ns time delay with a signal-to-noise ratio of 10~7 and 100 fs time resolution in <1 min of acquisition time. We show that the doping profile with doping densities of the order of 10~(18) cm~(-3) can be detected with picosecond ultrasound, although there is no difference in the acoustic properties of the doped and undoped region. The detection mechanism is based on a different sensitivity function for a coherent strain pulse in the doped and undoped regions. These results are corroborated by experiments at room temperature and 10 K.
机译:通过基于激光的皮秒超声技术以非接触且非侵入性的方式在时域中研究了通过分子束外延生长的不同n掺杂GaAs同质外延结构中的掺杂分布。基于异步光学采样的实验使用了两个飞秒激光器,这使我们能够在1 ns的时间延迟内以10〜7的信噪比和100 fs的时间分辨率在不到1分钟的采集时间内检测光反射率的变化。时间。我们表明,尽管掺杂区和非掺杂区的声学特性没有差异,但是皮秒级超声可以检测出掺杂浓度为10〜(18)cm〜(-3)的掺杂分布。该检测机制基于对掺杂区和非掺杂区中相干应变脉冲的不同灵敏度函数。这些结果在室温和10 K下的实验中得到了证实。

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