Nanoelectromechanical system-integrated detector with silicon nanomechanical resonator and silicon nanochannel field effect transistor

摘要

We demonstrate the fabrication and operation of an integrated device containing a nanoelectromechanical system and an integrated detector. This on-chip silicon nanochannel field effect transistor is used to measure the motion of a silicon nanomechanical resonator at room temperature. Furthermore, we describe the operation of the device as a silicon-based room-temperature on-chip amplifier for improved displacement detection of nanomechanical resonators.