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Plasmonic Terahertz Wave Detector Based on Silicon Field-Effect Transistors with Asymmetric Source and Drain Structures

机译:基于具有非对称源漏结构的硅场效应晶体管的等离子体太赫兹波检测器

摘要

In this paper, we present the validity and potential capacity of a modeling and simulation environment for the nonresonant plasmonic terahertz (THz) detector based on the silicon (Si) field-effect transistor (FET) with a technology computer-aided design (TCAD) platform. The nonresonant and "overdamped" plasma-wave behaviors have been modeled by introducing a quasi-plasma electron charge box as a two-dimensional electron gas (2DEG) in the channel region only around the source side of Si FETs. Based on the coupled nonresonant plasma-wave physics and continuity equation on the TCAD platform, the alternate-current (AC) signal as an incoming THz wave radiation successfully induced a direct-current (DC) drain-to-source output voltage as a detection signal in a sub-THz frequency regime under the asymmetric boundary conditions with a external capacitance between the gate and drain. The average propagation length and density of a quasi-plasma have been confirmed as around 100 nm and 1x10(19)/cm(3), respectively, through the transient simulation of Si FETs with the modulated 2DEG at 0.7 THz. We investigated the incoming radiation frequency dependencies on the characteristics of the plasmonic THz detector operating in sub-THz nonresonant regime by using the quasi-plasma modeling on TCAD platform. The simulated dependences of the photoresponse with quasi-plasma 2DEG modeling on the structural parameters such as gate length and dielectric thickness confirmed the operation principle of the nonresonant plasmonic THz detector in the Si PET structure. The proposed methodologies provide the physical design platform for developing novel plasmonic THz detectors operating in the nonresonant detection mode.
机译:在本文中,我们以计算机辅助设计(TCAD)技术为基础,介绍了基于硅(Si)场效应晶体管(FET)的非谐振等离子体太赫兹(THz)检测器的建模和仿真环境的有效性和潜在能力平台。通过在Si FET的源极侧周围的沟道区域引入准等离子体电子电荷箱作为二维电子气(2DEG),可以对非谐振和“过阻尼”的等离子体波行为进行建模。基于TCAD平台上耦合的非谐振等离子体波物理特性和连续性方程,交流(AC)信号作为输入THz波辐射成功地感应了直流(DC)漏源输出电压作为检测在非对称边界条件下,在亚THz频率范围内产生信号,栅极和漏极之间具有外部电容。通过以0.7 THz调制2DEG的Si FET的瞬态仿真,已证实准等离子体的平均传播长度和密度分别约为100 nm和1x10(19)/ cm(3)。我们通过在TCAD平台上使用准等离子模型,研究了入射辐射频率与在次THz非谐振状态下运行的等离子THz检测器的特性的相关性。准等离子体2DEG模型对光响应的模拟依赖性对结构参数(如栅极长度和介电层厚度)的依赖性证明了Si PET结构中非谐振等离子体THz检测器的工作原理。所提出的方法为开发在非谐振检测模式下运行的新型等离子体THz检测器提供了物理设计平台。

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