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Highly reproducible and reliable metal/graphene contact by ultraviolet-ozone treatment

机译:通过紫外线臭氧处理可高度重现且可靠的金属/石墨烯接触

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摘要

Resist residue from the device fabrication process is a significant source of contamination at the metal/graphene contact interface. Ultraviolet Ozone (UVO) treatment is proven here, by X-ray photoelectron spectroscopy and Raman measurement, to be an effective way of cleaning the metal/graphene interface. Electrical measurements of devices that were fabricated by using UVO treatment of the metal/graphene contact region show that stable and reproducible low resistance metal/graphene contacts are obtained and the electrical properties of the graphene channel remain unaffected.
机译:器件制造过程中残留的抗蚀剂是金属/石墨烯接触界面处的重要污染源。 X射线光电子能谱和拉曼测量证明,紫外线臭氧(UVO)处理是清洁金属/石墨烯界面的有效方法。通过对金属/石墨烯接触区进行UVO处理而制造的器件的电学测量表明,可以获得稳定且可重现的低电阻金属/石墨烯接触,并且石墨烯通道的电性能不受影响。

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  • 来源
    《Journal of Applied Physics》 |2014年第11期|114304.1-114304.5|共5页
  • 作者单位

    Key Laboratory for the Physics and Chemistry of Nanodevices and Department of Electronics, Peking University, Beijing 100871, China,Physical Measurement Laboratory, National Institute of Standards and Technology, Gaithersburg, MD 20899, USA;

    Physical Measurement Laboratory, National Institute of Standards and Technology, Gaithersburg, MD 20899, USA;

    Physical Measurement Laboratory, National Institute of Standards and Technology, Gaithersburg, MD 20899, USA;

    Key Laboratory for the Physics and Chemistry of Nanodevices and Department of Electronics, Peking University, Beijing 100871, China;

    Key Laboratory for the Physics and Chemistry of Nanodevices and Department of Electronics, Peking University, Beijing 100871, China;

    Physical Measurement Laboratory, National Institute of Standards and Technology, Gaithersburg, MD 20899, USA;

    Physical Measurement Laboratory, National Institute of Standards and Technology, Gaithersburg, MD 20899, USA;

    Physical Measurement Laboratory, National Institute of Standards and Technology, Gaithersburg, MD 20899, USA;

    Key Laboratory for the Physics and Chemistry of Nanodevices and Department of Electronics, Peking University, Beijing 100871, China;

    Key Laboratory for the Physics and Chemistry of Nanodevices and Department of Electronics, Peking University, Beijing 100871, China;

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  • 正文语种 eng
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