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机译:Cu /多孔低k互连中电迁移的温度相关活化能
Lab of Reliability Engineering, Division of Product Quality, Shanghai Huali Microelectronics Corporation, Pudong New District, Shanghai, China;
Lab of Reliability Engineering, Division of Product Quality, Shanghai Huali Microelectronics Corporation, Pudong New District, Shanghai, China;
Lab of Reliability Engineering, Division of Product Quality, Shanghai Huali Microelectronics Corporation, Pudong New District, Shanghai, China;
Lab of Reliability Engineering, Division of Product Quality, Shanghai Huali Microelectronics Corporation, Pudong New District, Shanghai, China;
Lab of Reliability Engineering, Division of Product Quality, Shanghai Huali Microelectronics Corporation, Pudong New District, Shanghai, China;
机译:埋在多孔低k电介质中的与铜互连的负电阻偏移有关的电迁移破坏模式
机译:抑制使用虚拟金属的铜/多孔低k互连的电迁移早期失效
机译:势垒工艺对Cu /多孔低k互连件电迁移可靠性的影响
机译:Cu /多孔低k互连下游电迁移特性
机译:用于高级互连的多孔低k电介质的机械可靠性:多孔低k电介质的不稳定性机理及其通过惰性等离子体引发的骨架结构再聚合的介导研究。
机译:用于进一步缩小超大型集成器件-Cu互连的等离子增强化学气相沉积SiCH膜的低k覆盖层的材料设计
机译:Cu /多孔超低k互连技术中的介质/金属扩散屏障