Measurements of the Gas Temperature of a Low‐Pressure RF Discharge

摘要

An experimental investigation has been made of the manner in which the gas temperature resulting from an rf sheath discharge is affected by the incident line power, gas fill, and Q of the cavity in which it is confined. Data are presented of the measured gas temperature as a function of line power for cavities of different Q. Qualitative results are submitted of the effectiveness of the gas and of the cavity in dissipating the heat resulting from the power absorbed by the cavity. Argon, hydrogen, nitrogen, and argon and water vapor were the gas fills investigated.